![]() ![]() For example, certain semiconductor manufacturer systems performing impedance matching utilizing a VVC and frequency tuning, but require that the frequency provided by the RF generator remain within a predetermined range. While the performance of matching networks has improved, there is need for faster and more reliable tuning that meets certain system requirements. This helps with repeatability in both the depositing and etching. Accordingly, the matching network must be able to automatically vary itself to ensure that the maximum power transfer is achieved. In plasma applications, the load impedance can vary depending on several factors, such as time, power level, pressure, gas flow, chemistry of the gasses, and whether the plasma has been struck. This is done so that maximum power transfer can be achieved at the load. The complex conjugate is used to eliminate the reactive part of the impedance, leaving only the resistive part, and the resistive part is made equal. That is, the source, being of some impedance with a resistive part and a reactive part, will be terminated into the complex conjugate impedance, and the load impedance will be driven by the complex conjugate of its impedance. In electronic circuits, matching networks are used to match the source impedance to the load impedance and vice versa. Some examples of variable capacitors are vacuum variable capacitors (VVCs) and electronically variable capacitors (EVCs). The ability to dynamically change impedance and frequency response provides more flexibility for the applications variable capacitors are used in, and can compensate for variations from unit-to-unit. They allow for the precise tuning of frequency and/or impedance in applications needing a dynamic system response, such as in plasma processes. Variable capacitors are used in many applications, such as matching networks and variable filters. ![]() The disclosures of the aforementioned priority applications are incorporated herein by reference in their entirety. The present application further claims the benefit of U.S. 16/743,492 further claims the benefit of U.S. 16/735,088 further claims the benefit of U.S. 16/722,219 further claims the benefit of U.S. 16/673,220 further claims the benefit of U.S. 16/667,293 further claims the benefit of U.S. 16/654,788 further claims the benefit of U.S. 15/816,351 further claims the benefit of U.S. 15/450,495 further claims the benefit of U.S. 29, 2016, which claims the benefit of U.S. 6, 2017, which is a continuation in part of U.S. 17, 2017, which is a continuation in part of U.S. 16/415,764, filed May 17, 2019, which is a continuation in part of U.S. 16, 2019, which is a continuation in part of U.S. 29, 2019, which is a continuation in part of U.S. 4, 2019, which is a continuation in part of U.S. 20, 2019, which is a continuation in part of U.S. ![]() 6, 2020, which is a continuation in part of U.S. 15, 2020, which is a continuation in part of U.S. The present application is a continuation in part of U.S. ![]()
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